Energy Enhanced polishing of diamond surface

Diamond is a highly valuable material with diverse industrial applications, particularly in the

fields of semiconductor, optics, and high-power electronics. However, its high hardness and

chemical stability make it difficult to realize high-efficiency and ultra-low damage machining of

diamond. To address these challenges, several polishing methods have been developed for both

single crystal diamond (SCD) and polycrystalline diamond (PCD), including mechanical,

chemical, laser, and ion beam processing methods. In this review, the characteristics and

application scope of various polishing technologies for SCD and PCD are highlighted.

Specifically, various energy beam-based direct and assisted polishing technologies, such as laser

polishing, ion beam polishing, plasma-assisted polishing, and laser-assisted polishing, are

summarized. 

LP Laser Polishing

IBP Ion Beam Polishing

PAP Plasma Assisted Polishing

LAP   Laser Assisted Polishing